Hybrid integrated silicon optical bench planar lightguide circuits

J. Gates, D. Muehlner, M. Cappuzzo, M. Fishteyn, L. Gomez, G. Henein, E. Laskowski, I. Ryazansky, J. Shmulovich, D. Syvertsen, A. White
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引用次数: 15

Abstract

As optical system architectures have matured over the past ten years, the use of silicon optical bench (SiOB) technology for cost effective packaging of opto-electronic components has migrated from relatively simple laser and photodetector submounts to sophisticated hybrid integrated optical subsystems. Lucent Technologies Bell Laboratories has been developing SiOB technology for use as an integrated packaging platform for lasers, photodetectors, waveguides and passive optical components. In this paper we describe two integrated optical sub-assemblies using planar lightguide circuits (PLCs) as examples of transceivers and complex laser source modules. The assemblies integrate lasers, photodetectors, passive waveguide splitters, wavelength division multiplex (WDM) filters, etched fiber and ball lens attachment sites, turning mirrors, optical reversing elements, deposited metals, solder dams and solders for mechanical and electrical contacts onto a single silicon optical sub-assembly. The approach allows for low cost batch processing, assembly and testing of complex components using the silicon wafer as a carrier and the use of automated pick-and-place machines for assembly.
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混合集成硅光台平面光导电路
随着光学系统架构在过去十年中的成熟,硅光学平台(SiOB)技术用于光电元件的成本效益封装已经从相对简单的激光器和光电探测器子支架转移到复杂的混合集成光学子系统。朗讯科技贝尔实验室一直在开发SiOB技术,作为激光器、光电探测器、波导和无源光学元件的集成封装平台。在本文中,我们描述了两个集成光学组件,使用平面光导电路(plc)作为收发器和复杂激光源模块的例子。该组件将激光器、光电探测器、无源波导分路器、波分复用(WDM)滤波器、蚀刻光纤和球透镜附着点、转向镜、光学反转元件、沉积金属、用于机械和电气触点的焊料和焊料集成到单个硅光学子组件上。该方法允许低成本的批量处理,组装和测试复杂的组件使用硅片作为载体和使用自动拾取和放置机器进行组装。
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