{"title":"Light Scattering by Sub-Half Micron Spherical Particles on Silicon and Oxide/Silicon Surfaces*","authors":"E. Bawolek, E. Hirleman","doi":"10.1364/surs.1992.pd3","DOIUrl":null,"url":null,"abstract":"We report angle resolved light scattering characteristics of individual polystyrene spheres on silicon and on a 91.5 nm thick film of oxide on silicon. Scattering was measured as a function of polarization using a He-Ne laser at a 45 degree incident angle.","PeriodicalId":339350,"journal":{"name":"Surface Roughness and Scattering","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Roughness and Scattering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/surs.1992.pd3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We report angle resolved light scattering characteristics of individual polystyrene spheres on silicon and on a 91.5 nm thick film of oxide on silicon. Scattering was measured as a function of polarization using a He-Ne laser at a 45 degree incident angle.
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