Development of MEMS varactor for selectable-band patch filter

G. Rehder, A. Serrano, F. S. Correra, M. Carrenõ
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引用次数: 2

Abstract

The use of MEMS as tuning elements is interesting for their higher performance in terms of loss and nonlinearity. Here, MEMS varactors are integrated to a patch filter through a flip-chip process in order to change the filter center frequency. The selected frequencies are the ones assigned to WiMAX frequency bands at 2.5 GHz and 3.5 GHz.
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可选带贴片滤波器微机电系统变容器的研制
使用MEMS作为调谐元件是有趣的,因为它们在损耗和非线性方面具有更高的性能。在这里,MEMS变容管通过倒装工艺集成到贴片滤波器中,以改变滤波器的中心频率。所选频率是分配给WiMAX频段2.5 GHz和3.5 GHz的频率。
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