Nano-Structural Characteristics and Optical and Electrical Properties of Obliquely Deposited Manganese Oxide Thin Films

Fatemeh Chahshouri, Elehe Khani, H. Savaloni, Rojan Savari
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引用次数: 1

Abstract

In this work, manganese oxide thin films as a graded helical square tower-like (terraced) sculptured thin films with 8, 9, and 10 arms were deposited on a glass substrate by oblique angle deposition (OAD) method. Structural and morphological characteristics of the produced samples were obtained through xray diffraction (XRD), atomic force microscopy (AFM), and field emission electron microscopy (FESEM) analyses. The optical and electrical properties of manganese oxide thin film were studied by Photoluminescence (PL), UVvisible (UV-VIS), and V-I measurement. The spectrophotometry analysis on both s-and p-polarized lights at 90° incident light angles carried out for obtaining the optical spectra of the samples. Then, it used to calculate refractive index, energy gaps, and absorption peaks. Photoluminescence spectra for MnO films showed a 2.31, 2.28, and 2.26 eV gap energy in 8, 9, and 10 arms. The electrical resistance measurements of these samples showed that the resistance has strongly dependent on the intensity and energy of the incident light. The electrical resistance of these samples was also investigated under green, blue, red, and light radiation with 100 watts/cm2 power density.
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斜沉积氧化锰薄膜的纳米结构特征及光电性能
在这项工作中,通过斜角沉积(OAD)方法,将氧化锰薄膜作为具有8,9和10臂的渐变螺旋方形塔状(梯级)雕刻薄膜沉积在玻璃基板上。通过x射线衍射(XRD)、原子力显微镜(AFM)和场发射电镜(FESEM)分析获得了样品的结构和形态特征。通过光致发光(PL)、紫外可见(UV-VIS)和V-I测量研究了氧化锰薄膜的光学和电学性质。在90°入射光角下,对双p偏振光进行分光光度分析,得到样品的光谱。然后用它计算折射率、能隙和吸收峰。MnO薄膜的光致发光光谱显示,其8、9和10臂的间隙能分别为2.31、2.28和2.26 eV。这些样品的电阻测量表明,电阻与入射光的强度和能量有很大的关系。在绿、蓝、红和功率密度为100瓦/平方厘米的光辐射下,研究了这些样品的电阻。
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