{"title":"Design and Analysis of a Moving Mirror Supporting Mechanism for Fourier Transform Spectroscopy","authors":"Feifei Tian, Siyuan Li","doi":"10.1109/ICEDME50972.2020.00129","DOIUrl":null,"url":null,"abstract":"Moving mirror supporting mechanism is a key component of Fourier transform spectrometer(FTS), its motion precision and the maximum range of travel affect the performance of the instrument. Based on the double parallelogram structure, a symmetrical flexible moving mirror supporting mechanism is designed. Simulation results show the system permits ± 5 mm of mirror travel with the tilt value of less than ±4.8urad and the shear value of less than 3um. Excellent shear performance and tilt performance make it well suited for most FTS instruments.","PeriodicalId":155375,"journal":{"name":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 3rd International Conference on Electron Device and Mechanical Engineering (ICEDME)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEDME50972.2020.00129","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Moving mirror supporting mechanism is a key component of Fourier transform spectrometer(FTS), its motion precision and the maximum range of travel affect the performance of the instrument. Based on the double parallelogram structure, a symmetrical flexible moving mirror supporting mechanism is designed. Simulation results show the system permits ± 5 mm of mirror travel with the tilt value of less than ±4.8urad and the shear value of less than 3um. Excellent shear performance and tilt performance make it well suited for most FTS instruments.
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