{"title":"A flexible liquid microlens based on electrowetting","authors":"Chenhui Li, Hongrui Jiang","doi":"10.1109/OMEMS.2012.6318801","DOIUrl":null,"url":null,"abstract":"We report on a flexible liquid microlens actuated by electrowetting mechanism. The microlens structure is made of soft polymer and its substrate is made much thinner than the lens to reduce the stress on the lens when it is stretched on a curved surface. A low-temperature fabrication process is developed to reduce the stress in the polymer. The focal length f can be varied between -14 mm and 33 mm. The lens can resolve 11.30 line pairs per mm at f = 33 mm according to a 1951 USAF resolution chart test and the response time of the lens is approximately 50 ms.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"36 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318801","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
We report on a flexible liquid microlens actuated by electrowetting mechanism. The microlens structure is made of soft polymer and its substrate is made much thinner than the lens to reduce the stress on the lens when it is stretched on a curved surface. A low-temperature fabrication process is developed to reduce the stress in the polymer. The focal length f can be varied between -14 mm and 33 mm. The lens can resolve 11.30 line pairs per mm at f = 33 mm according to a 1951 USAF resolution chart test and the response time of the lens is approximately 50 ms.
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