S. Shida, Okihara Shin-ichiro, K. Suda, K. Haraguchi, Y. Kato
{"title":"Nanometer-Resolution Cross Sectional Observation of the Changes in Multilayer Thin Films and Substrates due to Laser Ablation","authors":"S. Shida, Okihara Shin-ichiro, K. Suda, K. Haraguchi, Y. Kato","doi":"10.2526/JSEME.46.66","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":269071,"journal":{"name":"Journal of the Japan Society of Electrical-machining Engineers","volume":"55 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Japan Society of Electrical-machining Engineers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2526/JSEME.46.66","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}