Compact reliability model for degradation of advanced p-MOSFETs due to NBTI and hot-carrier effects in the circuit simulation

C. Ma, H. Mattausch, M. Miyake, T. Iizuka, M. Miura-Mattausch, K. Matsuzawa, S. Yamaguchi, T. Hoshida, M. Imade, R. Koh, T. Arakawa, J. He
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引用次数: 30

Abstract

A compact reliability model is reported, which includes both the channel hot carrier (CHC) and the negative bias thermal instability (NBTI) effects in p-MOSFETs. The developed compact NBTI model, which describes both interface-state generation and hole-trapping mechanisms, is further improved by considering additionally the impact of the drain bias Vds. With increased Vds, the NBTI effect is weakened due to the reduction of the vertical gate oxide field, and the CHC effect is enhanced by the increased lateral channel electric field. Therefore, the threshold voltage is observed to decrease in the low Vds regime, and then increases again in the high Vds regime. Such “turn-around” characteristic is correctly modeled using the improved compact NBTI model. Implementation of this reliability model into the surface-potential-based compact model HiSIM enables accurate prediction of the CHC enhanced NBTI degradation for wide ranges of time duration and bias conditions. This allows real-time simulation for the circuit-performance degradation occurring during actual circuit operation.
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基于电路仿真中NBTI和热载子效应的p- mosfet退化的紧凑可靠性模型
本文报道了一个紧凑的可靠性模型,该模型同时考虑了p- mosfet中的通道热载流子(CHC)和负偏置热不稳定性(NBTI)效应。所开发的紧凑NBTI模型既描述了界面状态产生机制,也描述了空穴捕获机制,通过考虑漏偏置Vds的影响,进一步改进了该模型。随着Vds的增大,垂直栅氧化场的减小使NBTI效应减弱,而横向沟道电场的增大使CHC效应增强。因此,观察到阈值电压在低Vds状态下降低,然后在高Vds状态下再次升高。利用改进的紧凑NBTI模型对这种“回转”特性进行了正确的建模。将该可靠性模型应用到基于表面电位的紧凑模型HiSIM中,可以在大范围的时间持续时间和偏置条件下准确预测CHC增强的NBTI退化。这允许实时模拟在实际电路运行过程中发生的电路性能下降。
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