Prachi Gupta, Prashant Singh, Rajshri Kumari Chaudhry, P. Srivastava
{"title":"Design and analysis of RF MEMS Varactor for extended tuning range","authors":"Prachi Gupta, Prashant Singh, Rajshri Kumari Chaudhry, P. Srivastava","doi":"10.1109/ICCCCM.2013.6648915","DOIUrl":null,"url":null,"abstract":"Electrostatically actuated parallel plate MEMS Varactor is a low power, highly sensitive and robust device. Simple parallel plate Varactor structure possesses a maximum tuning range of 1.5:1 after which the plates start collapsing. In the present paper we have employed different Varactor designs for extended tuning range. The major effort is done to develop a Varactor that can achieve tuning range greater than 1.5. The design and analysis is carried out on COMSOL Multiphysics simulation tool in accordance with standard POLYMUMP'S process.","PeriodicalId":230396,"journal":{"name":"2013 International Conference on Control, Computing, Communication and Materials (ICCCCM)","volume":"181 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Control, Computing, Communication and Materials (ICCCCM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICCCCM.2013.6648915","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12
Abstract
Electrostatically actuated parallel plate MEMS Varactor is a low power, highly sensitive and robust device. Simple parallel plate Varactor structure possesses a maximum tuning range of 1.5:1 after which the plates start collapsing. In the present paper we have employed different Varactor designs for extended tuning range. The major effort is done to develop a Varactor that can achieve tuning range greater than 1.5. The design and analysis is carried out on COMSOL Multiphysics simulation tool in accordance with standard POLYMUMP'S process.
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