Design and Simulation of a High Performance Lateral BJTs on TFSOI

Abstract

Lateral BJT's have received renewed interest with the advent of BiCMOS and Silicon on Insulator (SOI) technology. It's been reported in [1] that a 67 GHz f_max novel lateral BJT's on TFSOI has been fabricated with a simplified process. This paper presents an investigation of this high performance transistor by using 2D process and device numerical simulation. Accurate geometrical structure and reasonably good doping profiles with a simple fabrication process are successfully achieved in the process simulation. However, a careful attention is required to define the mesh for the device to obtain an accurate measurement of device characteristics. With a base, low-doped collector, emitter and high-doped collector concentrations of 3 times 10¹⁷ cm^-3, 1.0 times 10¹⁷ cm^-3, 5 times 10²⁰ cm^-3 and 3 times 10²⁰ cm^-3 respectively, a variation of 0.1-0.13 mum base width is observed. I-V and frequency performance of these transistors are simulated and analyzed. Y-parameter measurement at frequency 10 MHz - 1000 GHz shows a 21 GHz f_max was successfully achieved at V_BE=0.7 V, V_CE=2.0 V and I_CE=6.0 muA.