Depth determination of critical fluence-limiting defects within planarized and non-planarized mirror coatings

C. Stolz, J. Wolfe, P. Mirkarimi, J. Folta, J. Adams, M. Menor, R. Raman, Norm Neilsen, M. Norton, R. Luthi, N. Teslich, C. Menoni, D. Patel
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引用次数: 2

Abstract

Multilayer interference optical mirror coatings are traditionally fluence-limited by nodular inclusions. Planarization of these defects modifies the geometrically and interference-induced light intensification to increase the laser resistance of mirror coatings. Previous studies using engineered defects on the substrate or buried in the middle of the coating stack have focused only on understanding the improvement in laser resistance. However, real coating defects are distributed throughout the coating. To better understand differences between the critical fluence-limiting defects of both planarized and non-planarized mirror coatings, laser damage pit depths were determined as a function of laser fluence.
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平面化和非平面化镜面涂层内临界限流缺陷的深度测定
多层干涉光学镜面涂层传统上受到结核夹杂物的影响。这些缺陷的平面化改变了几何和干涉诱导的光强,增加了反射镜涂层的激光阻力。以前的研究利用衬底上的工程缺陷或埋在涂层堆中间的缺陷,只关注于了解激光电阻的改善。然而,真正的涂层缺陷分布在整个涂层中。为了更好地了解平面化和非平面化镜面涂层的临界限流缺陷之间的差异,确定了激光损伤坑深度作为激光通量的函数。
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