Drive Mode of MEMS Rate Sensors with Software Phase Locked Loop

P. Rajesh George, M. Mary Jermila, Anwar K Backer, A. Anvar, N. Aparna Vishnu
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Abstract

A specialized processing and control loop design for a highly stable Software Phase Locked Loop (SPLL) & Digital Amplitude Control Loop (DACL) for MEMS Rate Sensor is discussed. The rate sensor requires good vibration amplitude stability with resonant frequency tracking as well as start-up characteristic with pre-defined frequency response. The control loops are analyzed and simulated in MATLAB, digitally implemented in a custom designed STM32F407 processor board with inbuilt unipolar 12-bit SAR ADC and DAC. Practical test results for different SPLL implementations are compared.
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软件锁相环MEMS速率传感器的驱动方式
讨论了用于MEMS速率传感器的高稳定软件锁相环(SPLL)和数字幅度控制环(DACL)的专用处理和控制回路设计。速率传感器要求具有良好的振幅稳定性和谐振频率跟踪,以及具有预定义频率响应的启动特性。在MATLAB中对控制回路进行了分析和仿真,并在定制设计的带有内置单极12位SAR ADC和DAC的STM32F407处理器板上进行了数字实现。对不同SPLL实现的实际测试结果进行了比较。
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