{"title":"A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms","authors":"K. Koh, Chengkuo Lee","doi":"10.1109/OMEMS.2012.6318890","DOIUrl":null,"url":null,"abstract":"A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2012.6318890","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications.
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