{"title":"Integrated microring tuning in deep-trench bulk CMOS","authors":"Chen Sun, E. Timurdogan, M. Watts, V. Stojanović","doi":"10.1109/OIC.2013.6552920","DOIUrl":null,"url":null,"abstract":"An all-digital ΔΣ-based heater driver and a 6-μm diameter microring resonator are monolithically-integrated in deep-trench bulk CMOS. With clock scaling and 2.5V supply voltage, the system demonstrates a 350GHz tuning range and 10-15μW/GHz tuning efficiencies.","PeriodicalId":436079,"journal":{"name":"2013 Optical Interconnects Conference","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Optical Interconnects Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OIC.2013.6552920","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 13
Abstract
An all-digital ΔΣ-based heater driver and a 6-μm diameter microring resonator are monolithically-integrated in deep-trench bulk CMOS. With clock scaling and 2.5V supply voltage, the system demonstrates a 350GHz tuning range and 10-15μW/GHz tuning efficiencies.
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