Initiation of nano-film bucklings under low-frequency alternate loads

Zhiming Guo, Shibin Wang, D. Cui, H. Jia, Lin’an Li
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Abstract

In this paper, we investigated the initiation of the straight-side buckling of the compressed thin film on flat PMMA substrate under alternate loads, with emphasis on the influences of loading frequency, film thickness and load amplitude on the initiation of the buckling, respectively. A fatigue-loading device based on piezoelectric ceramics has been designed for making the cyclic loadings available. The instability phenomenon has been recorded using a CCD camera and an optical microscope. The aluminum and copper thin films were studied in the experiments, the different loading modes have been involved in detailed experimental analysis. At present, experimental investigations of thin film buckling under cyclic load may be an efficient engineering solution in many practical fields such as micro-electro-mechanical systems(MEMS).
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低频交变载荷下纳米膜屈曲的起始
本文研究了交替载荷作用下平面PMMA基板上压缩薄膜的直侧屈曲起始,重点研究了载荷频率、薄膜厚度和载荷幅值对屈曲起始的影响。为了实现循环加载,设计了一种基于压电陶瓷的疲劳加载装置。用CCD相机和光学显微镜记录了这种不稳定现象。对铝和铜薄膜进行了实验研究,对不同的加载模式进行了详细的实验分析。目前,薄膜在循环载荷下屈曲的实验研究可能是许多实际领域如微机电系统(MEMS)中有效的工程解决方案。
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