S. Yoo, Joo-Young Jin, Joon-Geun Ha, C. Ji, Yong-Kweon Kim
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引用次数: 1
Abstract
We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.
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