Designing a reliability demonstration test on a lithography expose tool using Bayesian techniques

Mario Villacourt, M. Mahaney
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引用次数: 7

Abstract

The Bayesian Reliability Testing method is used for the estimation of the shape and scale parameters of an inverted gamma prior distribution of the mean time between failures (MTBF) for equipment having an exponential time to failure distribution. This method allows the use of existing failure data of the equipment in question, provided certain conditions are satisfied. The Bayesian method is usable to update the prior distribution as new failure data becomes available. Through this updating process, confidence is built in to reliability demonstrations.<>
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利用贝叶斯技术设计光刻曝光工具的可靠性演示测试
对于具有指数级故障间隔时间分布的设备,采用贝叶斯可靠性测试方法对其平均故障间隔时间(MTBF)的倒伽马先验分布的形状和尺度参数进行估计。在满足某些条件的情况下,该方法允许使用所讨论设备的现有故障数据。贝叶斯方法可以在新的失效数据出现时更新先验分布。通过这一更新过程,对可靠性演示建立了信心。
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