S. Vabishchevich, N. Vabishchevich, D. Brinkevich, V. Prosolovich, V. Kolos, O. Zubova
{"title":"OPTICAL AND STRENGTH PROPERTIES OF SACRIFICIAL LAYERS \nBASED ON POLYIMIDE FILMS","authors":"S. Vabishchevich, N. Vabishchevich, D. Brinkevich, V. Prosolovich, V. Kolos, O. Zubova","doi":"10.52928/2070-1624-2022-39-11-53-58","DOIUrl":null,"url":null,"abstract":"Optical and strength properties of films of a polyimide composition (polyimide PI-2610) for creating a sacrificial \nlayer deposited on the surface of single-crystal silicon plates of the KDB-10 brand by centrifugation are \ninvestigated. It has been established that they behave like elastoplastic materials. The true microhardness of polyimide \nPI-2610, measured at a load of 2 g, was ~0,5 GPa. The spectra of the disturbed total internal reflection \n(NPVO) of polyimide PI-2610 were compared with the spectra of the NPVO of pyrrole and kapton polyimide. \nIn the spectrum of the polyimide PI-2610, there are bands of vibrations of the 5-membered ring and valence \nvibrations of the C–Nst and CO–Cst groups. The most intense band in the spectrum of NPVO (as in pyrrole) is the band \nof deformation vibrations C-H with a maximum at 734 cm-1. The band at ~1700 cm-1, caused by valence vibrations \nof the C=O double bond, has two closely spaced maxima at 1706 and 1692 cm-1, which indicates two variants \nof the force field around the C=O bond. The presence of hydroxyl O–H groups in the spectra of polyimide \nPI-2610 was detected due to the presence of residual water in the polyimide structure.","PeriodicalId":386243,"journal":{"name":"HERALD OF POLOTSK STATE UNIVERSITY. Series С FUNDAMENTAL SCIENCES","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2022-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"HERALD OF POLOTSK STATE UNIVERSITY. Series С FUNDAMENTAL SCIENCES","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.52928/2070-1624-2022-39-11-53-58","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Optical and strength properties of films of a polyimide composition (polyimide PI-2610) for creating a sacrificial
layer deposited on the surface of single-crystal silicon plates of the KDB-10 brand by centrifugation are
investigated. It has been established that they behave like elastoplastic materials. The true microhardness of polyimide
PI-2610, measured at a load of 2 g, was ~0,5 GPa. The spectra of the disturbed total internal reflection
(NPVO) of polyimide PI-2610 were compared with the spectra of the NPVO of pyrrole and kapton polyimide.
In the spectrum of the polyimide PI-2610, there are bands of vibrations of the 5-membered ring and valence
vibrations of the C–Nst and CO–Cst groups. The most intense band in the spectrum of NPVO (as in pyrrole) is the band
of deformation vibrations C-H with a maximum at 734 cm-1. The band at ~1700 cm-1, caused by valence vibrations
of the C=O double bond, has two closely spaced maxima at 1706 and 1692 cm-1, which indicates two variants
of the force field around the C=O bond. The presence of hydroxyl O–H groups in the spectra of polyimide
PI-2610 was detected due to the presence of residual water in the polyimide structure.