{"title":"Deep UV mastering using an all-solid-state 266 nm laser for an over 14 Gb/in/sup 2/","authors":"M. Furuki, M. Takeda, H. Yamatsu","doi":"10.1109/ICCE.1999.785260","DOIUrl":null,"url":null,"abstract":"The deep UV mastering process of the next generation high-density disk is demonstrated using an all-solid-state CW 266 nm laser for the first time. We achieved a density of over 14 Gbit/in/sup 2/ with acceptable jitter using both novolak type resist and chemically amplified resist.","PeriodicalId":425143,"journal":{"name":"1999 Digest of Technical Papers. International Conference on Consumer Electronics (Cat. No.99CH36277)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-06-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1999 Digest of Technical Papers. International Conference on Consumer Electronics (Cat. No.99CH36277)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICCE.1999.785260","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The deep UV mastering process of the next generation high-density disk is demonstrated using an all-solid-state CW 266 nm laser for the first time. We achieved a density of over 14 Gbit/in/sup 2/ with acceptable jitter using both novolak type resist and chemically amplified resist.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
