Analysis of uniform degradation in n-MOSFETS

L. Selmi, C. Fiegna, E. Sangiorgi, R. Bez, B. Riccò
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Abstract

A reliable numerical model to compute the energy distribution of hot electrons in one dimensional MOS structures is used to investigate the role of carrier energy on the degradation induced by optically generated substrate hot electrons. Comparison with preliminary experimental results suggests that the degradation is mainly due to carriers with energy below the Si-SiO/sub 2/ energy barrier.<>
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n- mosfet均匀退化分析
利用一维MOS结构中热电子能量分布的可靠数值模型,研究了载流子能量对光电衬底热电子降解的影响。与初步实验结果的比较表明,降解主要是由于能量低于Si-SiO/sub - 2/能量势垒的载流子。
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