Study on optimization of exposure energy distribution for fabrication of arbitrary 3-D microstructure by shaped beam using synchrotron radiation

M. Horade, S. Sugiyama
{"title":"Study on optimization of exposure energy distribution for fabrication of arbitrary 3-D microstructure by shaped beam using synchrotron radiation","authors":"M. Horade, S. Sugiyama","doi":"10.1109/MHS.2009.5351837","DOIUrl":null,"url":null,"abstract":"Research on establishment of a fabrication method of three-dimensional microstructure which used SR (Synchrotron Radiation) light is reported. As the advantage of this method, since there is no necessity of fabrication masks and it is suitable for rapid prototyping, reduction of fabrication time and cost is mentioned. In this time, we carry out basic research about realization of this fabrication method, and it succeeded in fabrication of the free-form surface by exposure between pixels overlap. Moreover, in order to fabricate the three-dimensional structure of arbitrary shape, the algorithm which can determine exposure energy amount in consideration of overlap was written to target form. Using this algorithm, fabrication of various arbitrary three-dimensional structures was possible by only single aperture without manufacture a mask for every form. It is examining using this technique for fabrication of μ-TAS or a reactor. The channel which has the inclination and free-form surface are fabricated by this method, improvement in functionality is promising.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"70 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Symposium on Micro-NanoMechatronics and Human Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.2009.5351837","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

Research on establishment of a fabrication method of three-dimensional microstructure which used SR (Synchrotron Radiation) light is reported. As the advantage of this method, since there is no necessity of fabrication masks and it is suitable for rapid prototyping, reduction of fabrication time and cost is mentioned. In this time, we carry out basic research about realization of this fabrication method, and it succeeded in fabrication of the free-form surface by exposure between pixels overlap. Moreover, in order to fabricate the three-dimensional structure of arbitrary shape, the algorithm which can determine exposure energy amount in consideration of overlap was written to target form. Using this algorithm, fabrication of various arbitrary three-dimensional structures was possible by only single aperture without manufacture a mask for every form. It is examining using this technique for fabrication of μ-TAS or a reactor. The channel which has the inclination and free-form surface are fabricated by this method, improvement in functionality is promising.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
同步辐射成形光束制备任意三维微结构的辐照能量分布优化研究
报道了一种利用同步辐射(SR)光制作三维微结构的方法。该方法的优点是不需要制作掩模,适合快速成型,缩短了制作时间和成本。本文对该制作方法的实现进行了基础研究,并成功实现了像素重叠曝光法制作自由曲面。此外,为了制作任意形状的三维结构,将考虑重叠的暴露能量确定算法写入目标形状。使用该算法,可以仅通过单个孔径制造各种任意三维结构,而无需为每种形式制造掩模。目前正在研究利用该技术制备μ-TAS或反应器。利用该方法制备了具有倾斜和自由曲面的沟槽,在功能性上有很大的提高。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Mesoscale-object handling by temperature modulation of surface stresses Three dimensional bipedal walking locomotion using dynamic passivization of joint control Wheelchair driving control with sway suppression of passenger's posture and evaluation of comfortable ride by emotional sweating Risk management system based on uncertainty estimation by multi-agent Functional shRNA expression system with reduced off-target effects
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1