{"title":"Numerical Modeling Of Optical Metrology Schemes For IC Line-width Measurements","authors":"C. Yuan, A. Strojwas","doi":"10.1109/NUPAD.1990.748248","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":348970,"journal":{"name":"Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NUPAD.1990.748248","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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