{"title":"Ultraviolet photodetector based on chemical vapor deposition grown MoO3 microplates","authors":"Rahul Kumar, Neeraj Goel, Mahesh Kumar","doi":"10.1109/iemeconx.2019.8876982","DOIUrl":null,"url":null,"abstract":"Two-dimensional $\\alpha$-MoO3 semiconductor material having wide band gap can be potentially used in a wide range of UV-light detection application. Here, we grown the large-scale film composed of $\\alpha$-MoO3 microplates by using chemical vapor deposition process and fabricated a UV detector. The X-ray diffraction and Raman spectroscopy confirmed the continuity and crystallinity of the deposited MoO3 film on SiO2/Si substrate. The device exhibited a high responsivity of ~ 500 mA/W and a photo/dark current ratio of over 6 and a significant fast response time under UV-light (360 nm) irradiation. An efficient UV-light detection of the MoO3 microplates can be attributed to the depletion-layer modulation process.","PeriodicalId":358845,"journal":{"name":"2019 9th Annual Information Technology, Electromechanical Engineering and Microelectronics Conference (IEMECON)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 9th Annual Information Technology, Electromechanical Engineering and Microelectronics Conference (IEMECON)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/iemeconx.2019.8876982","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Two-dimensional $\alpha$-MoO3 semiconductor material having wide band gap can be potentially used in a wide range of UV-light detection application. Here, we grown the large-scale film composed of $\alpha$-MoO3 microplates by using chemical vapor deposition process and fabricated a UV detector. The X-ray diffraction and Raman spectroscopy confirmed the continuity and crystallinity of the deposited MoO3 film on SiO2/Si substrate. The device exhibited a high responsivity of ~ 500 mA/W and a photo/dark current ratio of over 6 and a significant fast response time under UV-light (360 nm) irradiation. An efficient UV-light detection of the MoO3 microplates can be attributed to the depletion-layer modulation process.
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