Comparison of high power sputtered dielectric mirrors for PW laser

Laser Damage Pub Date : 2022-12-02 DOI:10.1117/12.2642134
T. Willemsen, T. Gross, M. Gauch, H. Ehlers, D. Kramer, P. Velpula, W. Ebert
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Abstract

Latest advances of high intensity laser facilities enable the beam transport of petawatt laser pulses and can provide novel fundamental insights in high energy plasma physics or laser fusion. The very high peak intensities put enormous demands on the required large sized optics. Beam transport mirrors reflect pulses with only several tens of fs and maintain their phase while providing best possible laser induced damage threshold. State of the art, such mirrors are mostly manufactured by thermal evaporation techniques as they provide a large and uniform deposition area. Their porous layer structure causes changing spectral characteristics and wavefront when vacuum-air cycled. Especially large sized mirrors can show crazing and thereby decrease up-time of PW beamlines. In contrast, sputtered layers are very compact and provide non changing characteristics. Stable and reproducible sputter processes enable the deposition of more complex design structures necessary for further optimization of the laser induced damage threshold. However, deposition rate is slow and an uniform large sized area difficult to achieve for sputtered coatings. In our study, we show a self-constructed and built-up ion beam sputtering (IBS) machine capable to deposit large sized substrates up to a diameter of 550 mm. A design study is presented to evaluate best HR810nm mirror to meet demanding spectral requirements and providing maximized laser damage threshold for HAPLS at ELI beamlines. In the end, a field optimized design is applied with a measured LIDT of 0.9 J/cm2 at 42 fs and 1 kHz. This design is used to manufacture beam transport mirrors for HAPLS applying IBS.
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PW激光器高功率溅射介质反射镜的比较
高强度激光设备的最新进展使激光脉冲的光束传输成为可能,并为高能等离子体物理或激光聚变提供了新的基础见解。非常高的峰值强度对所需的大尺寸光学器件提出了巨大的要求。光束传输镜反射只有几十秒的脉冲,并保持其相位,同时提供最好的激光诱导损伤阈值。目前,这种反射镜大多是通过热蒸发技术制造的,因为它们提供了一个大而均匀的沉积区域。它们的多孔层结构导致真空-空气循环时光谱特性和波前发生变化。特别是大尺寸的反射镜会出现裂纹,从而减少PW光束线的正常运行时间。相比之下,溅射层非常紧凑,并提供不变的特性。稳定和可重复的溅射过程使沉积更复杂的设计结构成为进一步优化激光诱导损伤阈值所必需的。然而,溅射涂层的沉积速度较慢,且难以形成均匀的大面积。在我们的研究中,我们展示了一个自行构建的离子束溅射(IBS)机器,能够沉积直径达550毫米的大尺寸衬底。提出了一项设计研究,以评估最佳的HR810nm反射镜,以满足苛刻的光谱要求,并为ELI光束线的HAPLS提供最大的激光损伤阈值。最后,应用了一种现场优化设计,在42 fs和1 kHz下测量LIDT为0.9 J/cm2。本设计用于利用IBS技术制造HAPLS光束传输镜。
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