Improvement in dielectric properties of bilayer ZnO/MgO films deposited by Sol-Gel technique

Z. Habibah, M. Wahid, L. N. Ismail, R. A. Bakar, M. Rozana, M. Rusop
{"title":"Improvement in dielectric properties of bilayer ZnO/MgO films deposited by Sol-Gel technique","authors":"Z. Habibah, M. Wahid, L. N. Ismail, R. A. Bakar, M. Rozana, M. Rusop","doi":"10.1109/RSM.2013.6706531","DOIUrl":null,"url":null,"abstract":"Magnesium oxide and bilayer ZnO/MgO dielectrics film were successfully deposited using spin coating technique. The effect of MgO layer thickness towards prepared dielectric films behaviour was determined by controlling the deposition time. The comparison of the MgO and ZnO/MgO dielectrics film properties shows that the bilayer ZnO/MgO with 238nm MgO layer thickness shows better dielectrics properties compared to others. This was due to its small surface roughness which resulted in better electrical properties that have high resistivity and low leakage current. Optimized bilayer ZnO/MgO film was then used as the dielectrics film for fabrication of organic capacitor. Capacitor performance was determined via capacitance-voltage (C-V) analysis at different frequency applied and it revealed that, the capacitance value increased from 2.4pF to 10pF with addition of PVDF-TrFE organic ferroelectric layer on bilayer ZnO/MgO film caused by high polarization produced in the film.","PeriodicalId":346255,"journal":{"name":"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RSM.2013.6706531","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

Magnesium oxide and bilayer ZnO/MgO dielectrics film were successfully deposited using spin coating technique. The effect of MgO layer thickness towards prepared dielectric films behaviour was determined by controlling the deposition time. The comparison of the MgO and ZnO/MgO dielectrics film properties shows that the bilayer ZnO/MgO with 238nm MgO layer thickness shows better dielectrics properties compared to others. This was due to its small surface roughness which resulted in better electrical properties that have high resistivity and low leakage current. Optimized bilayer ZnO/MgO film was then used as the dielectrics film for fabrication of organic capacitor. Capacitor performance was determined via capacitance-voltage (C-V) analysis at different frequency applied and it revealed that, the capacitance value increased from 2.4pF to 10pF with addition of PVDF-TrFE organic ferroelectric layer on bilayer ZnO/MgO film caused by high polarization produced in the film.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
溶胶-凝胶法制备双层ZnO/MgO薄膜的介电性能
采用自旋镀膜技术成功地制备了氧化镁和ZnO/MgO双层介质薄膜。通过控制沉积时间来确定MgO层厚度对制备的介电膜性能的影响。MgO和ZnO/MgO介质薄膜性能的比较表明,MgO层厚度为238nm的双层ZnO/MgO具有较好的介电性能。这是由于其表面粗糙度小,从而产生了更好的电学性能,具有高电阻率和低漏电流。采用优化后的ZnO/MgO双层膜作为介质膜制备有机电容器。通过不同施加频率下的电容电压(C-V)分析确定了电容器的性能,结果表明,在ZnO/MgO双层膜上添加PVDF-TrFE有机铁电层,由于薄膜产生高极化,电容值从2.4pF提高到10pF。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Capacitance-voltage hysteresis of MIS device with PMMA:TiO2 nanocomposite as gate dielectric Body doping analysis of vertical strained-SiGe Impact Ionization MOSFET incorporating dielectric pocket (VESIMOS-DP) Effect of microchannel geometry in fluid flow for PDMS based device FIB with EDX analysis use for thin film contamination layer inspection Fabrication of multi-walled carbon nanotubes hydrogen sensor on plastic
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1