{"title":"Effect of Ar pressure on the magnetic properties of Fe-Si/sub 3/N/sub 4/ thin film prepared by Co-sputtering","authors":"Y. Yoo, Seong-cho Yu, C. Kim, W. Lim","doi":"10.1109/INTMAG.1999.837775","DOIUrl":null,"url":null,"abstract":"Fe and Co-based thm films with amorphous stmcture [I] or nanoaystallme phase [2], whlch exhibit good soft magnehc properties up to 10 MHz, were developed. However, with a further demand for the miniaturization of elecfmmagmtic devices, active research is now under way to develop thin films exhibiting good soft magnetic properties up to 100 MHZ or GHz For applicabon granular films consisting of metallic magnetic grains surrounded by an intergranular phase with high elecmcal resistivity in order to reduce the eddy current loss are of great interest[3]. In this shldy we are reporting the effect of Ar pressure on the soft magnebc properties of Fe-SilNn thm films prepared by co-sputtcring technique","PeriodicalId":425017,"journal":{"name":"IEEE International Magnetics Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE International Magnetics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTMAG.1999.837775","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Fe and Co-based thm films with amorphous stmcture [I] or nanoaystallme phase [2], whlch exhibit good soft magnehc properties up to 10 MHz, were developed. However, with a further demand for the miniaturization of elecfmmagmtic devices, active research is now under way to develop thin films exhibiting good soft magnetic properties up to 100 MHZ or GHz For applicabon granular films consisting of metallic magnetic grains surrounded by an intergranular phase with high elecmcal resistivity in order to reduce the eddy current loss are of great interest[3]. In this shldy we are reporting the effect of Ar pressure on the soft magnebc properties of Fe-SilNn thm films prepared by co-sputtcring technique
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
