{"title":"Blowing Polysilicon Fuses: What Conditions are Best?","authors":"Yuanjing Li, A. Tang","doi":"10.1109/IRWS.2006.305244","DOIUrl":null,"url":null,"abstract":"A study has been conducted to understand polysilicon fuse blow mechanisms and determine optimized blow conditions. The correlation of optical microscope images, cross section SEM (scanning electron microscope) images, and electrical waveforms of fuses blown at different voltages revealed two different blow mechanisms. Furthermore, SEM images of fuses blown using different pulse widths showed the physical changes of fuses during the fuse blow process","PeriodicalId":199223,"journal":{"name":"2006 IEEE International Integrated Reliability Workshop Final Report","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE International Integrated Reliability Workshop Final Report","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRWS.2006.305244","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
A study has been conducted to understand polysilicon fuse blow mechanisms and determine optimized blow conditions. The correlation of optical microscope images, cross section SEM (scanning electron microscope) images, and electrical waveforms of fuses blown at different voltages revealed two different blow mechanisms. Furthermore, SEM images of fuses blown using different pulse widths showed the physical changes of fuses during the fuse blow process
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