Electrical Characterization of Thin Films Using Measurements of Electrical Resistivity

A.J.C. Vanegasa, German D Molina
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Abstract

Some procedures carried out in the National University of Colombia physics laboratories involved in the electrical characterization of thin films are highly troublesome and comprise several inaccuracies in the measurements that expose the results to misunderstandings. The following electrical characterization system is a real-time software-controlled data acquisition environment specially designed for the measurement of voltage and current in thin films using the four-probe testing method. The system also allows the study of the thermal behavior of thin films using a heating source and provides measurements storage in a plain-text archive for further research
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用电阻率测量薄膜的电特性
在哥伦比亚国立大学物理实验室进行的一些涉及薄膜电特性的程序非常麻烦,并且在测量中包含一些不准确的地方,使结果容易被误解。下面的电特性系统是一个实时软件控制的数据采集环境,专门为使用四探针测试法测量薄膜中的电压和电流而设计。该系统还允许使用加热源研究薄膜的热行为,并在纯文本存档中提供测量存储,以供进一步研究
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