D. Mercier, P. Charvet, P. Berruyer, C. Zanchi, L. Lapierre, O. Vendier, J. Cazaux, P. Blondy
{"title":"A DC to 100 GHz high performance ohmic shunt switch","authors":"D. Mercier, P. Charvet, P. Berruyer, C. Zanchi, L. Lapierre, O. Vendier, J. Cazaux, P. Blondy","doi":"10.1109/MWSYM.2004.1338987","DOIUrl":null,"url":null,"abstract":"This paper presents a wideband ohmic shunt switch implemented on a coplanar waveguide (CPW). The switch is fabricated using a dielectric membrane with patterned metallic contacts that short the CPW line when it is electrostatically actuated. The switch has been extrapolated from measurements. It exhibits low insertion loss, good matching, high isolation from DC to W band (>20 dB up to 100 GHz) and very good mechanical properties with switching time <1/spl mu/s.","PeriodicalId":334675,"journal":{"name":"2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"48","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSYM.2004.1338987","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 48
Abstract
This paper presents a wideband ohmic shunt switch implemented on a coplanar waveguide (CPW). The switch is fabricated using a dielectric membrane with patterned metallic contacts that short the CPW line when it is electrostatically actuated. The switch has been extrapolated from measurements. It exhibits low insertion loss, good matching, high isolation from DC to W band (>20 dB up to 100 GHz) and very good mechanical properties with switching time <1/spl mu/s.
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