Tian-Lei Zhang, Gang Zhao, J. Chu, Wenhao Huang, M. Bartenwerfer, V. Eichhorn, S. Fatikow
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引用次数: 2
Abstract
Piezoelectric microcantilever transducers based on lead zirconate titanate (PZT) thin film have received considerable interest because of their wide potential applications in nanotechnology, biosensors and microelectromechanical systems. In this work a self-sensing and self-actuating PZT piezoelectric cantilever array is designed and fabricated for parallel dynamic Atomic Force Microscope (AFM) imaging. Carbon Nanotube (CNT) tips are assembled to the free end of the cantilever array by nano-handling to enhance the imaging resolution. Detailed fabrication process of the array and nano-assembly of CNT tips are reported and characterizations of mechanical properties of the array are carried out and presented in this paper.
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