Silicon 2D Magnetic-field Multisensor

Abstract

A silicon 2D multisensor measuring simultaneously and independently the in-plane components of the magnetic field is experimentally tested. The devise contains one central ohmic contact and symmetrically to it - two perpendicular to each other pair of ohmic contacts. The sensitivities of the two sensor channels in accordance with symmetry are equal, reaching $\mathrm{S}=25\ \mathrm{V}/\mathrm{AT}$ at $T=300\ \kappa$ and $\mathrm{S}=119\ \mathrm{V}/\mathrm{AT}$ at $T=77\ \mathrm{K}$. The channel cross-sensitivity does not exceed 5% as the internal noise is of the $1/f$ type.