Large Third-Order Nonlinearities in Atomic Layer Deposition Grown Nitrogen-Enriched TiO2 Nanoscale Films

R. Kuis, T. Gougousi, Isaac Basaldua, Paul Burkins, J. A. Kropp, A. Johnson
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Abstract

Nonlinear refractive index, n2, values as high as 1±.1x10-9 cm2/W were measured in atomic layer deposition (ALD) grown TiO2 nanoscale films, using femtosecond thermally managed Z-scan. The several order of magnitude increase in n2 is believed due to the incorporation of nitrogen during growth.
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原子层沉积生长富氮TiO2纳米膜的大三阶非线性
非线性折射率,n2,值高达1±。在原子层沉积(ALD)生长的TiO2纳米级薄膜中,使用飞秒热管理z扫描测量了1x10-9 cm2/W。n2的几个数量级的增加被认为是由于生长过程中氮的掺入。
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