Aluminum backside segregation

H. Hieslmair, S. Mchugo, E. Weber
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引用次数: 9

Abstract

Aluminum backside gettering of iron was quantitatively characterized and distinguished from effects of precipitation or back surface fields. It is shown that for high impurity concentrations, precipitation increases minority carrier diffusion lengths. This effect is small compared to the diffusion length increases from aluminum gettering. Segregation coefficients (S) for iron between silicon and the backside aluminum were found exceeding 10/sup 6/ and there are indications for S up to 10/sup 7/.
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铝背面偏析
定量表征了铝对铁的背面沾污,并将其与沉淀或背面电场的影响区分开来。结果表明,当杂质浓度较高时,沉淀增加了少数载流子的扩散长度。与吸铝后扩散长度的增加相比,这种影响较小。硅和背面铝之间铁的偏析系数(S)超过10/sup 6/,有迹象表明S可达10/sup 7/。
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