Assembly of functional nanodebice using platinum/ tungsten nanowire

Abstract

This paper presets the assembly of a functional device with double metal nanowire. A PZT cantilever was used for electrodes of the device and etched by FIB. Two carbon nanotubes (CNT) were assembled to the separated electrodes of PZT cantilever. A tungsten probe is etched by focused ion beam (FIB) into 300 nm in diameter and 25.4 μm in length. Then the probe is coated by parylene and cut the tip to open the tungsten. A tungsten nanowire with 907nm in length and a platinum nanowire with 209 nm in length grew from the tip of the CNTs via field emission by introducing hexacabonyl tungsten and trimethyl cyclopentadienyl platinum individually inside a field emission electron microscope.