PBW (Proton Beam Writer) application for EcoDesign of electronics

Abstract

The subject of this research is to find a process applicable to recycling FPC system adding extra functionality in the polymeric material without photo sensitive agent. We chose PBW (Proton Beam Writer) as an option. The potential impact by charge can modify electronic state and chemical bonding. Acceleration voltage and specific charge limit the depth of material modification. Proton is preferred to save acceleration voltage but the potential impact is low. We have investigated hydrogen molecular ions (H2+ and H3+) to compromise penetration depth and improve potential impact inside the material. These molecular ions are not easy to accelerate but have two or triple fold charges therefore they are especially suited to make big shallow structures. We can efficiently make the GTH (Groove and Thru-hole) structure combining them with Proton for deep structure.