The Intertool Profile Interchange Format

A. Wong, D.S. Boningf, M. L. Heytens, A. Neureuther
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引用次数: 7

Abstract

A formal object-oriented approach to the data structuring and data management of semiconductor wafer structure and device information is presented. The profile in- terchange format (PIF) is extended beyond a file format "in- tersite" version in order to enhance the storage and access of profile information, the communication of profile information between cooperating tools, and the integration and portability of technology CAD tools. An intertool PIF toolkit is a program- matic interface to profile information, consisting of a library of objects for the storage and manipulation of data by technology CAD (TCAD) tools. PIF/Gestalt is presented as a test imple- mentation of the toolkit which provides C and Common Lisp language interfaces, implemented on a data base for use in a CADKIM system for semiconductor process design and fab- rication. Test applications using PIF/Gestalt demonstrate the desirability of the formal object model, the appropriateness of an object-oriented interface, and implementation of that model on an object-oriented data base.
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工具间配置文件交换格式
提出了一种面向对象的方法,用于半导体晶圆结构和器件信息的数据结构和数据管理。为了提高轮廓信息的存储和访问能力,提高协同工具之间轮廓信息的交流能力,提高技术CAD工具的集成化和可移植性,将PIF格式从文件格式的“现场”版本进行了扩展。工具间PIF工具箱是一个配置信息的编程接口,它由一个对象库组成,用于通过技术CAD (TCAD)工具存储和操作数据。PIF/格式塔是该工具包的测试实现,该工具包提供C和Common Lisp语言接口,在数据库上实现,用于半导体工艺设计和制造的CADKIM系统。使用PIF/格式塔的测试应用程序演示了正式对象模型的可取性、面向对象接口的适当性,以及该模型在面向对象数据库上的实现。
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