Fabrication of high frequency (25-75 MHz) single element ultrasonic transducers

J. Cannata, Jinyan Zhao, S. Ayyappan, T. Ritter, Wo-Hsing Chen, K. Shung
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引用次数: 9

Abstract

The design and fabrication of high frequency single element ultrasonic transducers present a multitude of challenges for the transducer engineer, from size constraints to electrical impedance matching. This paper discusses the trade-offs involved in procedures used to fabricate lithium niobate (LiNbO/sub 3/) and lead titanate (PbTiO/sub 3/) transducers in the 25 MHz to 75 MHz range. Transducers of varying dimensions were built according to an f-number range of 2-3.5. Desired focal depths were achieved with use of either an acoustic lens or a spherically focused piezoceramic. Silver epoxy backing with an acoustic impedance of approximately 5.9 MRayls was used in all designs. All transducers were designed around a 50/spl Omega/ send and receive circuit. Electrical tuning of the transducer to the receive circuitry was achieved by using an RF transformer and/or a length of coaxial cable. All transducers were tested in a pulse-echo arrangement using a Panametrics 5900PR pulser, a Wavetek function generator and a LeCroy digital oscilloscope. The bandwidth, insertion loss, and depth of focus were measured. Numerous transducers were fabricated with -6 dB bandwidths ranging from 40% to 74%, and two-way insertion loss values ranging from -14 dB to -28 dB.
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高频(25-75 MHz)单元件超声波换能器的制造
高频单元件超声波换能器的设计和制造给换能器工程师带来了许多挑战,从尺寸限制到电阻抗匹配。本文讨论了在25 MHz至75 MHz范围内用于制造铌酸锂(LiNbO/sub 3/)和钛酸铅(PbTiO/sub 3/)换能器的过程中所涉及的权衡。根据2-3.5的f值范围,构建了不同尺寸的传感器。使用声学透镜或球形聚焦压电陶瓷实现了期望的焦深。所有设计均采用声阻抗约为5.9 MRayls的环氧银衬底。所有换能器都是围绕50/spl ω /发送和接收电路设计的。通过使用射频变压器和/或一段同轴电缆来实现换能器对接收电路的电气调谐。使用panametics 5900PR脉冲发生器、Wavetek函数发生器和LeCroy数字示波器在脉冲回波布置下对所有换能器进行测试。测量了带宽、插入损耗和聚焦深度。许多传感器的- 6db带宽从40%到74%不等,双向插入损耗值从-14 dB到-28 dB不等。
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