Comparison between laser stylus and contact stylus measurements on rough surfaces

L. Mattsson, P. Wågberg
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Abstract

The introduction of submicron sensitive laser stylus profilometers1,2 based on the compact disk (CD) laser pick-up head and operating by an auto focusing technique, has opened up a new area for non-contact surface roughness measurement in the critical micron range. As many machined surfaces, paper surfaces and painted coatings have surface structures in this roughness range the field for applications is very wide. Careful investigations are therefore needed to show how the laser stylus technique compares with the common technique of contact stylus measurements. This paper, which is related to a thorough study on surface roughness of paper and ceramic materials,3 presents some of the special features observed for the laser stylus instrument.
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激光触控笔与接触式触控笔测量粗糙表面的比较
亚微米敏感激光笔轮廓仪1,2基于CD激光拾取头和自动聚焦技术的引入,开辟了临界微米范围内非接触式表面粗糙度测量的新领域。由于许多机械加工表面,纸张表面和油漆涂层的表面结构在这个粗糙度范围内,应用领域非常广泛。因此,需要仔细的研究来显示激光触控笔技术与普通触控笔测量技术的比较。本文对纸张和陶瓷材料的表面粗糙度进行了深入的研究,介绍了激光触笔仪观察到的一些特殊特征。
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Integrating Figure and Finish Measurements with Surface Profiling Instruments Determination of Interface Roughness Using A Wavelength Scanning TIS Instrument Light Scattering from Photofabricated Surfaces with non-Gaussian Statistical Properties Enhanced Long Range Correlations of Light Reflected from Random Rough Surfaces X-Ray scattering from grazing incidence telescopes
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