Circuit Technologies For A Single-1.8V Flash Memory

Tanzawa, Tanaka, Takeuchi, Nakamura
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However, this switch also has disadvantage that the minimum operating Vcc is mainly limited by a threshold voltage of an enhancement transistor which prevents the leakage current from flowing in the Vpp switch during the inactive state (Fig.1). Another serious problem with a single low-voltage Flash memoly is that efficiency of charge pump circuits is drastically degraded with Vcc lowering. Area for charge pump circuits in a single low-voltage Flash memory will drastically increase for a constant Vpp-charging time (Fig.5). Focusing on Vpp switching and generation, this paper describes (1) a Vpp switch composed of only intrinsic high-voltage transistors without channel implantation, which flows no leakage current from Vpp, reduces the maximum voltage applied to the gate of the switchmg transistor and can operate even at a Vcc of 1.W, (2) a row decoder scheme such that all blocks are in selected state in standby, preventing the standby leak from flowing in the Vpp switches used in row decoders, and (3) a merged pump scheme enabling a charge pump circuit to output two voltage levels with an individually optimized efficiency while reducing the circuit area in comparison with the conventional scheme which requires two charge pump circuits for two voltage levels. Vpp Switch Figs.1 and 2 respectively illustrate the conventional [2,3] and proposed Vpp switches. In the conventional switch, an enhancement transistor M1 is used to prevent the leakage current from Vpp when unselected (Sw=L) and an intrinsic transistor without channel implantation M2 is used to improve the positive-feedback efficiency of the booster when selected (Sw=H). The switching operation is as follows. The source voltage Vcap of the M1 is equal to the gate voltage Vg of the M1 minus the threshold voltage Vt(E) of the M1 with the clock Clk high (Vcap=Vg-Vt(E)). After that, the Clk turns to low and the gate voltage of the M1 increases to Vg’=Vcap+Vcc-Vt(I), where Vt(1) is a threshold voltage of an intrinsic transistor. Thus the voltage gain per cycle is Vg’-Vg, i.e., Vcc-Vt(E)-Vt(1). When Vg reaches Vpp+Vt(E) due to this positive feedback, the M5 outputs Vpp. As descrived above, efficiency of the positive feedback for switching depends on Vcc-Vt(E)-Vt(I), so that the mini” operating Vcc is limited by Vt(E)+Vt(I). In case of a Vpp of 1 SV, a Vt(E) of l . W and a Vt(1) of 0.7V at a back bias of 18V, the maximum voltage for the switching gate and the minimum operating Vcc are respectively 19.W and 2.4V. A single-1.8V Flash memory requires further improved feedback efficiency of the booster. Only replacement of the M1 with an intrinsic transistor for efficiency improvement results in unallowable leakage current from internally generated Vpp. In case that this replacement is done in a 64M Flash chip [l], the Vpp leakage current is estimated as an order of 1 0 0 ~ 4 , whch is the same order as an output current of the charge pump circuit. The proposed Vpp switch can use intrinsic transistors for all ones. The M8 and MI5 bias Vcc to the source terminals of the M6 and M13 whose gates are biased to ground when the switch is unselected. As a result, the proposed switching circuit can change the leakage source from Vpp to Vcc. The operation current increases by no more than 10%. When the switch is selected, the operation is the same as the conventional one but the maximum gate voltage can be reduced to Vpp+Vt(I) by Vt(E)-Vt(1) (=1V). The feedback efficiency of the booster is also improved due to the low threshold voltage of the intrinsic M6,7. The transistors to be cut off, M8,10,11,15, are in state such that the gates are grounded and the sources are forced by Vcc. As shown in Fig.3, the minimum operating Vcc can be reduced by 1V compared with the conventional Vpp switch. As a result, the proposed switch operates even at a Vcc of 1.8V. Row Decoder In order to prevent the standby leak from flowing in Vpp switches, most of which are used in row decoders, we developed a scheme such that all blocks are in selected state in standby. In the conventional scheme such that all blocks are in unselected state in standby, the proposed Vpp switches will flow an unallowable standby current of an order of 1OuA. The standby leak path in that case is shown by the arrow in F i g 2 Fig.4 illustrates the new row decoder scheme using the proposed Vpp switch. All blocks are in selected state (PMP=H) independent of a block address (/RAm) in standby (CE=L), resulting in no standby leak. All word-lines WL’s are grounded through global word-lines GWL’s in standby. In active mode (CE=H), blocks are unselected (PMP=L) except for a selected block (/RAm=L). After that, the clock Clk boosts the gates of transfer transistors and connects the WL’s with the GWL’s. Thus, the combination of the proposed Vpp switch and all-block-selection-in-standby scheme makes it possible to eliminate both the standby and Vpp leak. Charge Pump Circuit A single-voltage Flash memory requires some charge pump circuits, one of which outputs 4.5V for read, 1OV for write and 20V for write and erase [l]. Fig3 indicates charge pump circuits will occupy large part of a low-voltage Flash chip unless the read/write/erase voltages are scaled down with Vcc. Fig.6 illustrates a merged pump scheme, which is based on the conventional pump proposed in [4] and enables to output 4.5V in read operation (RE=H) and 1OV in write operation (WE=H) with an individually optimized efficiency. A single fourstage charge pump in write operation is reorganized into two of a twostage charge pump connected in parallel with high efficiency in read operation. Fig.7 shows a measured output waveform of a proposed circuit at a Vcc of 1 .W. Capacitors in the PCl’s occupy most of the circuit area and thus the additional switches PC2’s lead to increase the circuit area by less than 10%. As a result, the proposed pump scheme reduces the area required for charge pump circuits in a Flash chip by 40%, as shown in Fig.5. Conclusion Three circuit technologies using only intrinsic high-voltage transistor without channel implantation have been developed for a low-voltage Flash memory. These technologies will realize a single-1.8V Flash memory eliminating fabrication steps for enhancementand depletionchannel implantation. Acknowledgment The authors wish to thank Drs. J. Miyamoto and K. Sakui for their encouragement. Reference [l] Kim, J. K., VLSI Cir. Tech. Papers, pp.168-9, 1996. [2] Dahm, V.K. et al., ISSCC Tech. Papers, pp.166-7, 1983. [3] Donaldson, D.D. et al., ISSCC Tech. Papers, pp.168-9, 1983. [4] Umezawa, A. et al., IEEE-JSSC, vo1.27, pp. 1540-6, 1992.","PeriodicalId":175678,"journal":{"name":"Symposium 1997 on VLSI Circuits","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"19","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Symposium 1997 on VLSI Circuits","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIC.1997.623808","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 19

Abstract

Introduction This paper proposes three circuit technologies, a Vpp switch, row decoder and charge pump circuit, to realize a single-1.W Flash memory. Unlike a D W S R A M , a Flash memory requires a voltage as high as 2OV to rewrite data [l]. For low-voltage operation, there are two serious problems which we should overcome; one is highvoltage (Vpp) switching and the other is its generation. Vpp switches composed of only high-voltage nMOSFET’s have been used in Flash memories [2,3]. Unlike CMOS switches with large parasitic capacitance of N-well for pMOSFET’s, this nMOS-only Vpp switch has small junction and wiring capacitance, resulting in a short Vppcharging time and high-speed programming. However, this switch also has disadvantage that the minimum operating Vcc is mainly limited by a threshold voltage of an enhancement transistor which prevents the leakage current from flowing in the Vpp switch during the inactive state (Fig.1). Another serious problem with a single low-voltage Flash memoly is that efficiency of charge pump circuits is drastically degraded with Vcc lowering. Area for charge pump circuits in a single low-voltage Flash memory will drastically increase for a constant Vpp-charging time (Fig.5). Focusing on Vpp switching and generation, this paper describes (1) a Vpp switch composed of only intrinsic high-voltage transistors without channel implantation, which flows no leakage current from Vpp, reduces the maximum voltage applied to the gate of the switchmg transistor and can operate even at a Vcc of 1.W, (2) a row decoder scheme such that all blocks are in selected state in standby, preventing the standby leak from flowing in the Vpp switches used in row decoders, and (3) a merged pump scheme enabling a charge pump circuit to output two voltage levels with an individually optimized efficiency while reducing the circuit area in comparison with the conventional scheme which requires two charge pump circuits for two voltage levels. Vpp Switch Figs.1 and 2 respectively illustrate the conventional [2,3] and proposed Vpp switches. In the conventional switch, an enhancement transistor M1 is used to prevent the leakage current from Vpp when unselected (Sw=L) and an intrinsic transistor without channel implantation M2 is used to improve the positive-feedback efficiency of the booster when selected (Sw=H). The switching operation is as follows. The source voltage Vcap of the M1 is equal to the gate voltage Vg of the M1 minus the threshold voltage Vt(E) of the M1 with the clock Clk high (Vcap=Vg-Vt(E)). After that, the Clk turns to low and the gate voltage of the M1 increases to Vg’=Vcap+Vcc-Vt(I), where Vt(1) is a threshold voltage of an intrinsic transistor. Thus the voltage gain per cycle is Vg’-Vg, i.e., Vcc-Vt(E)-Vt(1). When Vg reaches Vpp+Vt(E) due to this positive feedback, the M5 outputs Vpp. As descrived above, efficiency of the positive feedback for switching depends on Vcc-Vt(E)-Vt(I), so that the mini” operating Vcc is limited by Vt(E)+Vt(I). In case of a Vpp of 1 SV, a Vt(E) of l . W and a Vt(1) of 0.7V at a back bias of 18V, the maximum voltage for the switching gate and the minimum operating Vcc are respectively 19.W and 2.4V. A single-1.8V Flash memory requires further improved feedback efficiency of the booster. Only replacement of the M1 with an intrinsic transistor for efficiency improvement results in unallowable leakage current from internally generated Vpp. In case that this replacement is done in a 64M Flash chip [l], the Vpp leakage current is estimated as an order of 1 0 0 ~ 4 , whch is the same order as an output current of the charge pump circuit. The proposed Vpp switch can use intrinsic transistors for all ones. The M8 and MI5 bias Vcc to the source terminals of the M6 and M13 whose gates are biased to ground when the switch is unselected. As a result, the proposed switching circuit can change the leakage source from Vpp to Vcc. The operation current increases by no more than 10%. When the switch is selected, the operation is the same as the conventional one but the maximum gate voltage can be reduced to Vpp+Vt(I) by Vt(E)-Vt(1) (=1V). The feedback efficiency of the booster is also improved due to the low threshold voltage of the intrinsic M6,7. The transistors to be cut off, M8,10,11,15, are in state such that the gates are grounded and the sources are forced by Vcc. As shown in Fig.3, the minimum operating Vcc can be reduced by 1V compared with the conventional Vpp switch. As a result, the proposed switch operates even at a Vcc of 1.8V. Row Decoder In order to prevent the standby leak from flowing in Vpp switches, most of which are used in row decoders, we developed a scheme such that all blocks are in selected state in standby. In the conventional scheme such that all blocks are in unselected state in standby, the proposed Vpp switches will flow an unallowable standby current of an order of 1OuA. The standby leak path in that case is shown by the arrow in F i g 2 Fig.4 illustrates the new row decoder scheme using the proposed Vpp switch. All blocks are in selected state (PMP=H) independent of a block address (/RAm) in standby (CE=L), resulting in no standby leak. All word-lines WL’s are grounded through global word-lines GWL’s in standby. In active mode (CE=H), blocks are unselected (PMP=L) except for a selected block (/RAm=L). After that, the clock Clk boosts the gates of transfer transistors and connects the WL’s with the GWL’s. Thus, the combination of the proposed Vpp switch and all-block-selection-in-standby scheme makes it possible to eliminate both the standby and Vpp leak. Charge Pump Circuit A single-voltage Flash memory requires some charge pump circuits, one of which outputs 4.5V for read, 1OV for write and 20V for write and erase [l]. Fig3 indicates charge pump circuits will occupy large part of a low-voltage Flash chip unless the read/write/erase voltages are scaled down with Vcc. Fig.6 illustrates a merged pump scheme, which is based on the conventional pump proposed in [4] and enables to output 4.5V in read operation (RE=H) and 1OV in write operation (WE=H) with an individually optimized efficiency. A single fourstage charge pump in write operation is reorganized into two of a twostage charge pump connected in parallel with high efficiency in read operation. Fig.7 shows a measured output waveform of a proposed circuit at a Vcc of 1 .W. Capacitors in the PCl’s occupy most of the circuit area and thus the additional switches PC2’s lead to increase the circuit area by less than 10%. As a result, the proposed pump scheme reduces the area required for charge pump circuits in a Flash chip by 40%, as shown in Fig.5. Conclusion Three circuit technologies using only intrinsic high-voltage transistor without channel implantation have been developed for a low-voltage Flash memory. These technologies will realize a single-1.8V Flash memory eliminating fabrication steps for enhancementand depletionchannel implantation. Acknowledgment The authors wish to thank Drs. J. Miyamoto and K. Sakui for their encouragement. Reference [l] Kim, J. K., VLSI Cir. Tech. Papers, pp.168-9, 1996. [2] Dahm, V.K. et al., ISSCC Tech. Papers, pp.166-7, 1983. [3] Donaldson, D.D. et al., ISSCC Tech. Papers, pp.168-9, 1983. [4] Umezawa, A. et al., IEEE-JSSC, vo1.27, pp. 1540-6, 1992.
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单1.8 v闪存的电路技术
本文提出了Vpp开关、行解码器和电荷泵电路三种电路技术来实现单1。W闪存。与dw S R a M不同,闪存需要高达2OV的电压来重写数据[1]。对于低压运行,有两个严重的问题需要我们克服;一个是高压(Vpp)开关,另一个是它的产生。仅由高压nMOSFET组成的Vpp开关已用于闪存[2,3]。与pMOSFET的n阱寄生电容较大的CMOS开关不同,这种仅nmos的Vpp开关具有较小的结和布线电容,从而缩短了充电时间和高速编程。然而,该开关也有缺点,即最小工作Vcc主要受到增强晶体管的阈值电压的限制,该阈值电压可以防止Vpp开关在非活动状态时漏电流流过(图1)。单个低压闪存的另一个严重问题是电荷泵电路的效率随着Vcc的降低而急剧下降。在恒定的vpp充电时间下,单个低压闪存中电荷泵电路的面积将急剧增加(图5)。针对Vpp开关及其产生,本文描述了(1)一种仅由本构高压晶体管组成的Vpp开关,该开关不产生Vpp漏电流,降低了开关晶体管栅极的最大电压,即使在Vcc为1时也能工作。W,(2)一种排解码器方案,使所有块在待机状态下处于选定状态,防止待机泄漏在排解码器中使用的Vpp开关中流动,以及(3)一种合并泵方案,使电荷泵电路能够以单独优化的效率输出两个电压水平,同时与需要两个电荷泵电路的传统方案相比,减少了电路面积。Vpp开关图1和图2分别展示了传统的[2,3]和提议的Vpp开关。在常规开关中,当未选择(Sw=L)时,使用增强晶体管M1来防止Vpp的漏电流,而当选择(Sw=H)时,使用未沟道注入的本品晶体管M2来提高升压器的正反馈效率。切换操作如下。M1的源电压Vcap等于M1的栅极电压Vg减去时钟时钟高的M1的阈值电压Vt(E) (Vcap=Vg-Vt(E))。之后,Clk变为低电平,M1的栅极电压增加到Vg ' =Vcap+ vc -Vt(I),其中Vt(1)是本征晶体管的阈值电压。因此,每个周期的电压增益为Vg ' -Vg,即vc -Vt(E)-Vt(1)。由于这个正反馈,当Vg达到Vpp+Vt(E)时,M5输出Vpp。如上所述,开关正反馈的效率取决于Vcc-Vt(E)-Vt(I),因此微型工作Vcc受到Vt(E)+Vt(I)的限制。在Vpp为1sv的情况下,Vt(E)为1。在18V的后置偏置下,W和Vt(1)为0.7V时,开关栅极的最大电压和最小工作电压分别为19。W和2.4V。单1.8 v闪存要求进一步提高升压器的反馈效率。只有将M1替换为本禀晶体管以提高效率,才会导致内部产生的Vpp产生不允许的泄漏电流。如果在64M Flash芯片中进行替换[1],则Vpp泄漏电流估计为1 0 0 ~ 4阶,与电荷泵电路的输出电流为同一阶。所提出的Vpp开关可以使用所有的本征晶体管。当开关未选中时,M8和MI5偏置Vcc到门偏置到地的M6和M13的源端。因此,该开关电路可以将泄漏源从Vpp转换为Vcc。运行电流增加不超过10%。当选择开关时,操作与常规相同,但最大栅极电压可以通过Vt(E)-Vt(1) (=1V)降低为Vpp+Vt(I)。由于本征电压M6,7的低阈值电压,也提高了升压器的反馈效率。被切断的晶体管M8、10、11、15处于这样的状态:栅极接地,源被Vcc强制。如图3所示,与常规Vpp开关相比,最小工作Vcc可降低1V。因此,所提出的开关即使在1.8V的Vcc下也能工作。为了防止Vpp交换机(大多数用于行解码器)中的备用泄漏流,我们开发了一种所有块在备用状态下处于选择状态的方案。在传统的备用方案中,所有的块都处于未选择状态,所提出的Vpp开关将流过一个不允许的1OuA数量级的备用电流。这种情况下的备用泄漏路径如图Fig. 1和Fig. 2中的箭头所示。 4说明了使用所提出的Vpp开关的新行解码器方案。所有块都处于选择状态(PMP=H),与备用(CE=L)的块地址(/RAm)无关,因此不会出现备用泄漏。所有的全球网都接地,全球网处于待命状态。在活动模式下(CE=H),除了选中的块(/RAm=L)之外,其他块(PMP=L)都是未选中的。之后,时钟时钟提升传输晶体管的栅极,并将WL和GWL连接起来。因此,所提出的Vpp交换机和全块选择备用方案的结合使得消除备用和Vpp泄漏成为可能。单电压闪存需要若干电荷泵电路,其中一个电路的读输出为4.5V,写输出为1v,写和擦除输出为20V[1]。图3表明,除非读/写/擦除电压随Vcc按比例降低,否则电荷泵电路将占据低压Flash芯片的大部分。图6给出了一种合并泵方案,该方案是在[4]中提出的传统泵的基础上,以单独优化的效率实现读操作输出4.5V (RE=H)和写操作输出1OV (WE=H)。在写操作中,将单个四级电荷泵重组为两个并联的两级电荷泵,在读操作中效率很高。图7显示了在Vcc为1 w时所提出电路的测量输出波形。PCl中的电容器占据了大部分电路面积,因此PC2的附加开关导致电路面积增加不到10%。因此,所提出的泵浦方案将Flash芯片中电荷泵电路所需的面积减少了40%,如图5所示。结论在低压快闪存储器中采用了三种仅使用本禀高压晶体管而不植入沟道的电路技术。这些技术将实现单1.8 v闪存,消除了增强和耗尽通道植入的制造步骤。作者希望感谢dr。宫本和樱井感谢他们的鼓励。参考文献[1]李建军,李建军,李建军,VLSI技术,pp. 68- 69, 1996。[2]李文强,李志强,《中国科学技术》,2003年第1期。[3]张志强,等。上海大学学报(自然科学版),第1卷第1期,1998。[4]李志强,等。中国生物医学工程学报,vol .27, pp. 357 - 357, 1992。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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