Effect of Surface Roughness on Thermal Contact Resistance of Fixed Interface in Thermal Measurement of Electron Device

Yuzhe Chen, Shiwei Feng, Yamin Zhang, Xin He, Kun Bai, Xuan Li
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引用次数: 3

Abstract

The interfacial thermal resistance between two solid materials is usually large, but there is still no way to eliminate it nor uniform measurement standard. Therefore, in thermal measurement technology, because the surface roughness of material directly affects the interface morphology, the change of total thermal resistance caused by the thermal contact resistance (TCR) fluctuations disturbs the accuracy of internal thermal analysis of the device. We prepared samples with different surface roughness and performed thermal measurements on them, compared with the test under vacuum environment and the condition filled with thermal interface materials, respectively. We found the heat transfer mechanism at the fixed interface. More importantly, it is shown that in the interval of surface roughness Ra < 6.4, the TCR shows good consistency when filled with thermal interface materials. This result will help to quickly improve the accuracy of thermal measurement technology.
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电子器件热测量中表面粗糙度对固定界面接触热阻的影响
两种固体材料之间的界面热阻通常较大,但仍没有办法消除,也没有统一的测量标准。因此,在热测量技术中,由于材料的表面粗糙度直接影响界面形貌,因此由热接触电阻(TCR)波动引起的总热阻变化会干扰器件内部热分析的准确性。我们制备了不同表面粗糙度的样品,对其进行了热测量,并分别与真空环境和填充热界面材料条件下的测试进行了比较。我们发现了固定界面处的传热机理。更重要的是,在表面粗糙度Ra < 6.4区间内,填充热界面材料时,TCR表现出良好的一致性。这一结果将有助于快速提高热测量技术的精度。
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