Qinggang Liu, Yiping Li, Wenbing Zhao, Xiaotang Hu
{"title":"Two Dimensions Angular Sensor for Micro/Nano Measurement","authors":"Qinggang Liu, Yiping Li, Wenbing Zhao, Xiaotang Hu","doi":"10.1109/NEMS.2007.352025","DOIUrl":null,"url":null,"abstract":"An optical non-contact and compact two dimensions angular sensor for micro angle measurement and nanometer scale measurement is introduced in the paper. The light beam emits from the angular sensor to the micro target and then is reflected back into the sensor. The angular sensor is designed based on optical differential method which adopts two orthogonal optical inner-reflection critical angle prisms. A microprocessor control unit (MCU) is used to carry out the signals' collection, processing, display, communication and control signal's output via upper computer. The measurement resolution is better than 0.05arcsec when the measurement range is set to be plusmn 600arcsec. Moreover, the sensor has the merits of adjustable resolution/range and can measure two dimensional angular displacements synchronously.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2007.352025","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
An optical non-contact and compact two dimensions angular sensor for micro angle measurement and nanometer scale measurement is introduced in the paper. The light beam emits from the angular sensor to the micro target and then is reflected back into the sensor. The angular sensor is designed based on optical differential method which adopts two orthogonal optical inner-reflection critical angle prisms. A microprocessor control unit (MCU) is used to carry out the signals' collection, processing, display, communication and control signal's output via upper computer. The measurement resolution is better than 0.05arcsec when the measurement range is set to be plusmn 600arcsec. Moreover, the sensor has the merits of adjustable resolution/range and can measure two dimensional angular displacements synchronously.
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