Ion-induced electron-emission from diamond

R. Kalish, V. Richter, B. Fizgeer, N. Koenigsfeld, Y. Avigal, A. Hoffman, E. Cheifetz, D. Hoxley
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Abstract

Electron emission from diamond surfaces has recently attracted much attention due to the outstanding physical and electrical properties of diamond (including the negative electron affinity (NEA) that some diamond surfaces exhibit). In general, induced electron emission from any material involves three stages: (I) the excitation of electrons in the bulk; (II) their transport to the surface and (III) the escape of the electrons into the vacuum. The ion induced electron emission (IIEE) yield (/spl gamma/) is defined as the number of emitted electrons per incident ion. It was found to depend on the electronic energy loss of the moving ion in the material. For clean metal surfaces /spl gamma/ is usually about 2-5, however for conducting, boron doped, hydrogenated diamond layers amazingly large values for the IIEE yield (reaching 150 for 200 keV proton bombardment) were recently reported. These large values suggest the use of diamond as a material for the realization of "single ion detectors". Furthermore, the unique way electron-hole pairs are created by ion impact, and the large depth inside the material where they are generated, may also shed light on the processes involved in the other forms of electron emission from diamond. Here the authors present results of IIEE from differently treated and different kinds of diamonds: (i) Boron doped CVD diamond on Si, grain size of the order of a few microns. (ii) Undoped CVD diamond layers, grain size of the order of a few microns. (iii) Boron doped CVD diamond thin layers with sub-micron grain size. (iv) Boron doped CVD diamond thin membranes (free standing) with sub-micron grain size, for which electrons emitted both backwards and forwards are measured.
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离子诱导的金刚石电子发射
由于金刚石优异的物理和电学性能(包括某些金刚石表面所表现出的负电子亲和性),金刚石表面的电子发射近年来引起了人们的广泛关注。一般来说,任何材料的感应电子发射包括三个阶段:(1)体中电子的激发;(II)它们向表面的传输和(III)电子逃逸到真空中。离子诱导电子发射(IIEE)产率(/spl γ /)定义为每个入射离子发射的电子数。发现它取决于材料中移动离子的电子能量损失。对于清洁的金属表面/spl γ /通常约为2-5,然而对于导电,硼掺杂,氢化金刚石层,最近报道了惊人的IIEE产率值(200 keV质子轰击达到150)。这些大的数值表明,金刚石可以作为实现“单离子探测器”的材料。此外,离子撞击产生电子-空穴对的独特方式,以及它们在材料内部产生的大深度,也可能为钻石其他形式的电子发射过程提供线索。在这里,作者介绍了不同处理和不同种类的金刚石的IIEE结果:(1)硼掺杂CVD金刚石在Si上,晶粒尺寸为几微米。(ii)未掺杂的CVD金刚石层,晶粒尺寸为几微米数量级。(3)亚微米级的硼掺杂CVD金刚石薄层。(iv)亚微米级硼掺杂CVD金刚石薄膜(独立),测量其前后发射电子。
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