Low Voltage Contact Electrostatic Discharge Phenomena

Abstract

Low voltage contact electrostatic discharge is examined from 1 volt to 100 volts which means whether the electrostatic discharge can ionize the gas molecule or not. The contact current flow from the small capacitor of about 2.2 pF is examined. There are several current flow patterns which should be strongly dependent on the contact area. If the contact area is fresh, the reproducible tunneling current should be observed with rising time of less than 100 ps. If any contamination occurs, the current flow is barrier type which strongly depends on current flow channel. Those current flow mechanisms are analyzed physically by using different material surfaces.