Field emission triode in a multifinger configuration with carbon nanotubes emitters

Abstract

In this work we present the development of a Carbon Nanotubes based multifinger microtriodes. Such device represents a viable and optimized alternative to the standard Spindt-type microtriode. The main improvement of the multifinger geometry consists on the possibility to reduce the cathode-grid capacitance by reducing the overlap between the two electrodes using a parallel patterning of the metallic lines. This approach allows doubling the cut-off frequency of the devices with respect to the Spindt-type triode. The prototype multifinger triode has been realized and field emission properties have been measured.