The challenges in automotive Low-k fine pitch bonding

Rusli Ibrahim, Au Yin Kheng, Y. Choi
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引用次数: 1

Abstract

Gold ball bonding remains to be the key technology in the assembly of semiconductor packaging. In response to the demand for higher I/O's and increased package functionality, the bond pad pitch (BPP) and bond pad opening (BPO) will subsequently decrease. This technology trend demands the use of finer wire diameters and provide good wire bonding process. However, wire bond reliability continues to be the most challenging area with ever finer pitch devices, particularly to meet automotive requirement. Non-stick on pad (NSOP) and insufficient intermetallic coverage (IMC) due to either wafer surface contaminants, wire bond process and material set are still the main issue in Low-K wire bonding technology. Decapsulation and wire pull after temperature cycling is another challenge that needs in depth focus. This paper specifically discusses various phenomenons of bondability, wafer variation and reliability issue towards meeting the automotive reliability requirements. Failure analysis results are also briefly discussed.
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汽车低k细间距粘接的挑战
金球键合仍然是半导体封装组装中的关键技术。为了响应更高的I/O和增加的封装功能的需求,键接垫间距(BPP)和键接垫开口(BPO)随后将减小。这种技术趋势要求使用更细的线径,并提供良好的线粘接工艺。然而,随着设备间距越来越小,特别是为了满足汽车需求,线键的可靠性仍然是最具挑战性的领域。焊盘不粘接(NSOP)和金属间覆盖(IMC)不足(由于晶圆表面污染物、线键合工艺和材料设置)仍然是低k线键合技术的主要问题。温度循环后的解封装和拉丝是另一个需要深入关注的挑战。本文针对满足汽车可靠性要求的各种粘结性现象、晶圆变化和可靠性问题进行了具体讨论。并简要讨论了失效分析结果。
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