P. Dayal, J. Nakajima, T. Sakaguchi, A. Matsutani, F. Koyama
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引用次数: 2
Abstract
In this paper we present a 0.98 mum 4-channel VCSEL array fabricated with grading a SiO2 spacer layer. A maximum of 5.4 nm wavelength span has achieved using 8.5 pairs of SiO2/Ta2O5 mirror. Also, surface nanomachining process is presented for making on-wafer precise spacer-layer gradients.
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