V. M. Vladimirov, V. Konnov, V. Markov, V. N. Martynovskiy, N. Repin, V. N. Shepov
{"title":"Microwave module for noncontact measurement of semiconductors","authors":"V. M. Vladimirov, V. Konnov, V. Markov, V. N. Martynovskiy, N. Repin, V. N. Shepov","doi":"10.1109/CRMICO.2010.5631197","DOIUrl":null,"url":null,"abstract":"Controlled microwave module for sensing of semiconductors is developed. The results of its application for measurement of minority-carrier lifetime in silicon are presented.","PeriodicalId":237662,"journal":{"name":"2010 20th International Crimean Conference \"Microwave & Telecommunication Technology\"","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 20th International Crimean Conference \"Microwave & Telecommunication Technology\"","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CRMICO.2010.5631197","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Controlled microwave module for sensing of semiconductors is developed. The results of its application for measurement of minority-carrier lifetime in silicon are presented.