High resolution imaging through integrated nanoholes image sensor

Abstract

A new imaging sensor with high resolution independent of the image sensorpsilas pixel size is presented. This sensor combines an integrated nanohole patterned in the first metal layer within each pixel and it can be fabricated in any standard submicron CMOS process. The final high resolution image requires a relative scanning motion between the sensor and the object under test; this relative motion can be achieved in an optofluidic microscopy system whereas the sample flows in a microfluidic channel while the image sensor acquires the high resolution image. Here, we describe the concept of the presented high resolution imaging sensor and elaborate on the optofludic microscopy system as one example of its implementation for a real biomedical imaging application.