{"title":"Radio Frequency MicroElectroMechanical Systems Components","authors":"Michal Okoniewski, G. McFeetors","doi":"10.1109/MIKON.2006.4345126","DOIUrl":null,"url":null,"abstract":"Radio frequency applications for microelectromechanical systems are reviewed, from a performance and fabrication prospective. The state of art in RF MEMS devices is discussed, focusing on switches, inductors, varactors, filters, phase shifters and antennas.","PeriodicalId":315003,"journal":{"name":"2006 International Conference on Microwaves, Radar & Wireless Communications","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 International Conference on Microwaves, Radar & Wireless Communications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIKON.2006.4345126","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Radio frequency applications for microelectromechanical systems are reviewed, from a performance and fabrication prospective. The state of art in RF MEMS devices is discussed, focusing on switches, inductors, varactors, filters, phase shifters and antennas.
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