Construction of 3-dimensional Image by Using A Characteristics of Secondary Electron Intensity with SEM and It's Application

Abstract

Intensity of secondary electron induced by incident electron beam depends on a degree of inclina-tion of surface. In the present work, 3-dimensional image for fracture surface was tried to constitute by applying this secondary elecron property with improved type SEM equipment which had four secondary electron detectors to remove a image distortion caused by observating direction. As the results, we could obtain 3-dimensional image and measured direction depth of fracture surfaces by real time treatment with 32 bit personal computer. In the case, the calculation time for one fractograph analysis was about only 5 minutes.